Surface property inspection device for test body

被検査体の表面性状検査装置

Abstract

(57)【要約】 【課題】広範囲な極微小かつ極微弱なムラ状の表面性状 の異常を容易に高感度で検出し面情報として記録できる 被検査体の表面性状検査装置の提供。 【解決手段】移動ステージ11に載置した、あるいは何 らかの方法で保持した被検査体12に過飽和気体7を吹 き付けて、同検査体の表面に露結面13を生成する過飽 和気体発生器1を備えた被検査体の表面性状検査装置で あって、前記過飽和気体発生器1は、霧状液混合気体6 の吹込口4および過飽和気体7の吹出口5を有し、かつ 前記吹出口5の近くにヒーター3A、3Bを設置した容 器2であることを特徴とし、また、移動ステージ11 と、被検査体12の表面を撮像するカメラ16を備えた ことを特徴とする被検査体の表面性状検査装置。
PROBLEM TO BE SOLVED: To provide a surface property inspection device for body to be tested, capable of detecting an abnormality of very small and very feeble uneven sur face property in a wide range easily and with high sensitivity, and capable of recording as surface information. SOLUTION: This surface property inspection device for body to be tested is equipped with a supersaturated gas generator 1 for spraying supersaturated gas 7 to a body to be tested 12 loaded on a moving stage 11 or held by some method and for producing a dew-condensed surface 13 on the surface of the body to be tested 12. The supersaturated gas generator 1 is a vessel 2 having such a characteristic that it has a blowing-in opening 4 of misty-liquid mixed gas 6 and a blowing-off opening 5 of the supersaturated gas 7 and that heaters 3A, 3B are installed near the blowing-off opening 5 therein. And, this surface property inspection device of the body to be tested also has such as characteristic that it is equipped with the moving state 11 and a camera 16 for picking up the an image of the surface of the body to be tested 12.

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Cited By (4)

    Publication numberPublication dateAssigneeTitle
    CN-102778461-ANovember 14, 2012深圳市华星光电技术有限公司液晶显示器中玻璃基板的检测方法及检测装置
    DE-102012101182-A1August 14, 2013Carl Zeiss Smt Gmbh, CCI-von Kahlden GmbHMethod for inspection of smooth upper surfaces of optical elements of extreme ultraviolet radiation-projection exposure systems with inspection device, involves guiding gaseous substance on upper surface and forming condensate film
    US-2010018332-A1January 28, 2010Tokyo Electron LimitedMethod and apparatus for detecting foreign matter attached to peripheral edge of substrate, and storage medium
    US-8210742-B2July 03, 2012Tokyo Electron LimitedMethod and apparatus for detecting foreign matter attached to peripheral edge of substrate, and storage medium